A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone
نویسندگان
چکیده
Measurement of a volatile solution is essential for laboratory safety and hospital clinic safety. In this paper, we present an ethanol-sensing acetone-sensing device using AlN piezoelectric material-based film bulk acoustic resonator (FBAR). order to realize sensing, the AlN-based FBAR was designed, fabricated, characterized. our sensor structure, upper electrode Ti/Au (30 nm/150 nm) composite electrode, bottom Mo material with 150 nm thickness, sensing 0.8 μm thickness AlN. We conducted experiment ethanol measurement acetone by detector on probe station within vector network analyzer. The resonance frequency decreased as concentration increases, while under circumstance increasing, detector’s response opposite. mechanisms both are discussed in demonstrating that could be able distinguish from due different mechanisms.
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ژورنال
عنوان ژورنال: Shock and Vibration
سال: 2022
ISSN: ['1875-9203', '1070-9622']
DOI: https://doi.org/10.1155/2022/8620943